Kuongororwa kwekuoma kwenzvimbo, kukwirira kwematanho uye ukobvu hwefirimu rakatetepa pa semiconductor wafers, malenzi ekuona akanyatsojeka uye zvikamu zvakaputirwa zvinosarudza zvakananga goho rekugadzirwa. Kuskena kweprobe yekuonana yechinyakare kunokwenya zviri nyore sampuli dzakatetepa, nepo michina yekuyera yemaziso isingakwanise kupa kunyatsojeka kwemazinga e nano. Ungawana sei bvunzo dzisingaparadze, kunyatsojeka kwe nano uye kuongororwa kwehuwandu hwemazhinji panguva imwe chete?
Iyo Wavelength OE itsva yeindasitiri inonzi interferometer ine nzira mbiri dzekuyera interferometry. Nekuona kusingasanganisike, inovhara mafambiro ese kubva pakutsvaga nekuvandudza murabhoritari kusvika pakugadzira online QC.
Maitiro maviri eDual Core Interferometry eKutarisa Kwese Pamusoro
Kusiyana nemichina yekuyera ine nzira imwe chete, sisitimu iyi inobatanidza maalgorithms eVSI (Vertical Scanning Interferometry) nePSI (Phase-Shifting Interferometry), zvichigutsa zvinodiwa zviviri zvepakati zvemuchina mumwe chete.
| Chinhu Chekuenzanisa | VSI / CSI | PSI |
|---|---|---|
| Nzvimbo Dzinonyanya Kushanda | Nzvimbo dzakaomarara, matanho, nzvimbo dzisina kusimba uye dzakaoma kunzwisisa | Nzvimbo dzakapfava zvikuru, dzinoenderera mberi uye dzinoona magirazi |
| Kuyera Kureba Kwakamira | Yakafara; inokwanisa kuyera migero yakadzika uye matanho akakwirira | Nzvimbo yakamanikana; hazvina kukodzera matanho makuru akaparadzana |
| Kugadziriswa Kwakamira | Nhamba yeNanometer; sub-nanometer inogoneka kuburikidza nemaalgorithms akagadziridzwa | Resolution yepamusoro-soro; kudzokorora kusvika padanho re sub-nanometer kunyange sub-angstrom |
| Kushivirira Kuoma Kwepamusoro | Yakakwirira | Zvakaderera |
| Kusanzwisisika kwechikamu | Hazvina kana kumboonekwa; huwandu hwehurefu hwakazara huripo | Pane chikanganiso chekuputira chechikamu che2π |
| Kumhanya Kwekuyera | Inoda axial scanning, inononoka zvishoma nezvishoma | Kazhinji nekukurumidza |
| Kuramba Kudedera | Inogona kuzununguka panguva yekuskena | Kuchinja-chinja kwemafuremu akawanda, kunonyanya kunzwa kudedera |
| Maitiro Akajairika | Kuomarara, kukwirira kwematanho, magadzirirwo madiki, nzvimbo dzakagadzirwa nemashini | Kuyedzwa kwekuomarara kwenzvimbo, chimiro chenzvimbo uye kusatsetseka kwayo |
PSI (Phase-Shifting Interferometry): Yakagadzirwa nehunyanzvi hwe nano-scale tiny height uye mafirimu matete zvakanyanya, zvichipa microscopic resolution yepamusoro.
Girazi reNdege
Girazi Rakakombama (Girazi Rakakombama)
Muenzaniso wePatani yePhotolithographic
VSI Vertical Scanning Interferometry: Yakagadzirirwa maworkpieces ane urefu hwakakura uye matanho marefu; chiyero chakazara chekuyera chinowanikwa pasina scan yakakamurwa.
Ma "circular micro bump array" ari pama "wafers" akagadzirwa zvakanaka
Elliptical micro bump array pamawafers akaputirwa epamusoro
microlens array
Kana ichienzaniswa nechiedza chichena chine 450–700 nm chipfupi, chinogona kudzikamisa chiedza chinobva pakupenya kwakawanda uye chinoita kuti pave nekushanda kwakasimba kwekudzivirira kukanganiswa. Yakashongedzerwa nejira remachira akawanda, chikamu ichi chemaziso chine kupenya kwakaderera chinogona kuburitsa zviratidzo zvakagadzikana uye zvakajeka, zvichipa mhedzisiro yechokwadi uye yakavimbika yekuyera.
2. Magadzirirwo Anotungamira Muindasitiri yeNano-Grade, Data Rinoteverwa Uye Rakagadzikana Renguva Refu
-Sisitimu iyi inoshandisa chiedza chena che LED chine wavelength yepakati pa550 nm, chakashongedzerwa nemaparamita epamusoro-soro anoshanda zvinoenderana nezvinodiwa zvepasi rose.
-Kugadziriswa kwakatwasuka: <1 nm, kudzokorora kukanganisa kwekuyera: <10 nm, kunyatsojeka kwenanometer
-Kuyera kwakakwirira kwakamira: 500 μm, hapana kudzokororwa kwekuisa panzvimbo patsva kunodiwa kune ma microstructures akaderera zvakanyanya.
-Kumhanya kwekuskena: 100 μm/s, scan imwe chete yakazara inopedzwa mukati memasekonzi gumi, ichienzanisa kurongeka uye kugona kwekuongorora.
-Ichitevedzera mitemo yeNIST inoteverwa, iyo yakavakirwa mukati me auto-calibration algorithm inoita kuti data re batch rirambe richitevedzana, ichisangana nemitemo yakasimba yeQC yeindasitiri ye semiconductor ne optical.
| Chinhu | Paramita |
| Kuyera Kugona | Kutaridzika kwepamusoro pe3D, kuomarara kwenzvimbo, kureba kwemasitepisi & ukobvu hwefirimu hwezvinhu zvinoratidza chiedza uye zvikamu zvemaziso |
| Nzira yeKuwana Data | Kuongororwa kweVertical Scanning Interferometry (VSI) + Kuongororwa kwePhase-Shifting Interferometry (PSI) |
| Sisitimu yeKuenzanisa | NIST inoteverwa nemaitiro ekugadzirisa otomatiki + algorithm yekuongorora otomatiki |
| Range yekuyera yakatwasuka | 500 μm |
| Munda weMaonero | 20× chinangwa: 0.87 × 0.65 mm |
| Kushanda kweKamera | Kukwanisa Kukuru: 2048×2448; Chiyero cheFuremu: 74 Fps; Kudzika kweBit: 12 bit |
| Kumhanya Kwekuskena | 100 μm/s (Nzira Yakarurama) |
| Sarudzo dzeLenzi Yechinangwa | Zvinangwa zvekukudza zvinogadziriswa zve20x / 50x |
| Dhizaini yekuisa | Chikuva chekudzivirira chinoshanda chakavakirwa mukati, chakatwasuka uye chakamira chiripo |
| Chiyero Chese (L×W×H) | 120 × 80 × 65 cm |
| Huremu Hwese | ≤58 kg |
3. Dhizaini yeKabhineti Yakabatanidzwa yeIndasitiri, Inoenderana neLab & Production Line
Yakagadzirirwa maworkshop ekugadzira zvinhu zvakawanda pamwe nema laboratori ekutsvagisa kwesainzi ane hunyanzvi hwekuisa hunoenderana nezvinodiwa.
Chikuva chekudzivirira chinoshanda chakavakirwa mukati: Kuyerwa kwakagadzikana pasi pekudzungudza kwefekitori, hapana tafura yekudzivirira yekudzungudza inodiwa.
Chimiro chekuisa zvinhu zviviri: Kugadzika kwakatwasuka kana kwakatwasuka, kubatanidzwa kuri nyore nemitsetse yekugadzira otomatiki uye nzvimbo dzekushandira dzemurabhoritari.
Muviri wakabatana wezvose-mu-mumwe: Chitsiko chidiki chine saizi ye120×80×65 cm, huremu hwe ≤58 kg, zviri nyore kuisa panzvimbo yacho.
Sisitimu yacho yese inobatanidza chiedza, interferometer main unit uye control module. Plug-and-play mushure mekusunungura, hapana kugadzirisa kwakaoma kwe optical path kunodiwa.
Kufukidzwa Kwakawanda Kwekushandiswa Kwekugadzira Kwakanyatsogadzirwa
Indasitiri yeSemiconductor: Kuongorora 3D topograph & step height yesilicon wafers nema micro-nano chips.
Precision Optics: Kuyedzwa kwekukora uye ukobvu hwefirimu rema lenzi e optical, zvinangwa uye zvinhu zve optical zvakaputirwa.
Mapendi Matsva Anoshanda: Kuongorora chimiro chepamusoro uye ukobvu hwemapendi anoratidzira & mafirimu matete anoshanda.
MaLabhoritari Ekutsvagisa Sainzi: Kuongorora hunhu hwemaumbirwo emicro-nano uye kunyatsoongorora chimiro chezvikamu.
Nemakore eruzivo rwehunyanzvi mukuongorora nekugadzira magirazi, Wavelength OE inogadzira yega nzira dzese dzemagirazi uye maalgorithms ekuyera emagetsi machena. Kudzora kwakazara kwehunyanzvi kubva kumagetsi, magirazi ekutarisa kusvika kumasisitimu ekugadzirisa. Chigadzirwa chega chega chinoongororwa nemagadzirirwo akasiyana-siyana usati wasvika. Tinopa rutsigiro rwehunyanzvi rwakazara mushure mekutengesa uye tinogadzirisa mhinduro dzekuyera dzakasarudzika zvichienderana nehukuru hwebasa revatengi uye zvinodiwa nemutsetse wekugadzira otomatiki.
Nguva yekutumira: Chikunguru-15-2026